Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set (3RD ed.)

Brief Description:
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--

Biographical Note:
Marc J. Madou, University of California, Irvine USA.

Review Quotes:

"... the alpha and omega textbook of micro and nanofabrication and technology. ... Madou's explanations often provide new perspectives to those who are more experienced. ... this feat of compressing a half century of science and engineering into one set of books makes them useful for years to come. The volumes can easily and aptly serve as course resources for students or as reference books for professionals. Summing Up: Recommended."--CHOICE Magazine

"... offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."--Suman Chakraborty, IIT Kharagpur, India

"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."--Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland

"... [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor... easy to read, and I found some concepts explained in ways I hadn't heard before... Very ambitious, very informative, very good for teaching!"--Jorg P. Kutter, Technical University of Denmark

Volume 1: Historical Note: The Ascent of Silicon, MEMS, and NEMS. Crystallography. Quantum Mechanics and the Band Theory of Solids. Silicon Single Crystal Is Still King. Photonics. Fluidics. Electrochemical and Optical Analytical Techniques. Volume 2: Lithography. Pattern Transfer with Subtractive Techniques. Pattern Transfer with Additive Techniques. Volume 3: From Traditional Manufacturing to Nanotechnology. Scaling Laws, Actuators, and Power and Brains in Miniature Devices.

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options.

The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Review Citations:

• Library Journal Supplements 11/15/2008 pg. 74 (EAN 9780849331800, Hardcover)
• Choice 03/01/2012 (EAN 9780849331800, Hardcover)